压电主动振动消除

 

The STACIS family of active piezoelectric vibration isolation solutions
  • stacis III active piezoelectric vibration isolation system
    STACIS III

    STACIS III通过连续测量地面活动,然后扩展和收缩复杂的压电致动器来过滤地面运动,从而实时消除振动。

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  • STACIS IIIc compact active vibration isolation system
    STACIS IIIc

    Compact low-profile version of STACIS III. Ideal in situations where there is no, or very low, raised floor.

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  • Quiet Island CleanRoom Semiconductor fab isometric
    Quiet Island

    针对影响大型仪器的建筑物振动的有效解决方案。用一个固定在下面底层地面上的“岛”替换一部分活动地面区域。

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  • Floor platform with active piezoelectric vibration isolators
    Floor Platform

    TMC’s STACIS Floor Platforms combine our Stainless Steel Platforms with a unique “lifthood” design, our isolators “cradle” the platform allowing the tool to be lifted a minimal distance above the floor. The platform may be custom designed to match the tool footprint or any desired shape.

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  • SEM-Base - the best floor vibration isolation for most SEMs and TEMs
    SEM-Base VI

    一个主动隔振地面平台,设计用于支撑任何实验室地面上的大多数商业SEM和类似的SEM型仪器。满足显微镜振动标准的理想解决方案。

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  • Hybrid optical table vibration isolation system
    TOOL-Base

    TOOL-Base不局限于单一的配置,而是可以被设计成与工具的尺寸、腿的布局和高度要求紧密匹配。

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  • Hybrid optical table vibration isolation system
    LaserTable-Base

    混合空气和压电隔振光学平台支撑系统具有极佳的隔振性能。

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  • Vibration cancellation system for moving stage semiconductor tools
    Stage-Base

    专为带高精度电动X-Y平台的高级半导体工具而设计的主要消振系统。

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